Bill Cipher, Doofenshmirtz and Azula.

Lord Viren

Palpatine

Slade

Ranked:

1. Slade

2. 2003 Shredder

3. Plankton

4. Bill

5. Aku

6. Father

7. Azula

8. Vilgax

9. The Lich

The Lich,2003 Shredder,Bill Cipher,And Slade

Out of the 9, probably Cipher and Plankton.

Out of these, Bill Cypher.

Catra, Horde Prime, Azula and Silco